特點(diǎn)
TRIPLE INDEPENDENT CONTROL LOOPS
SUPPORTS UP TO 3 VACUUM GAUGES
VACUUM PROBE SWITCHOVER
HIGH VACUUM GAUGE POWER UP
GAUGE STATUS INPUTS
LEAK DETECTION
ROUGHING PUMP TIMEOUT
GAUGE CALIBRATION
ADVANCED PROGRAMMER
EXPANDABLE I/O
MODBUS RTU or PROFIBUS-DP COMMUNICATIONS
By creating a special vacuum control function for its well-established Model 2704 Controller, complex processes like those found in vacuum heat treatment furnaces, may use a single combined function controller to save cost and space.
This multi-function facility will also be useful for similar vacuum related processes such as freeze dryers, autoclaves, semiconductor furnaces and CVD furnaces.